Thermal Vacuum Gas Mix Test Chamber - Abbess Instruments - Vacuum Chambers - Pumps and Systems

Custom Thermal Gas Mix Test Chamber System

The Abbess Thermal Vacuum Custom Gas Mix System allows articles under test placed inside the chamber to be exposed to high vacuum pressure as well as various temperatures via a heated and cooled Main Thermal Plate Assembly. A secondary Platen allows for a separate source or radiative heat for the Customer’s planned experiments. Mass flow controllers are configured to mix six types of gases and capable of regulating the gas mixture flow into the chamber. A Touch Screen/PC GUI Thermal Vacuum Cycle Controller (TVCC) is used to control functions and log performance data. The TVCC enables system control via panel-mounted switches and indicators and by a Touch Screen PC with a user-specific Graphical User Interface (GUI).

All operations can be managed by the Abbess PC/Touch Screen GUI Controller

The Custom Touch Screen/PC GUI Controller manages Turbo Pumping Speed and Gate Valve Manifold Configuration, as well Thermal Platen Temperatures and Gas Mixture and Mass Flow into the Chamber via Mass Flow Control Manifold. Data monitoring and logging is custom configured to the specific experimental concerns of the end user process scientists.

: Pressure Screen

: Gas Mixture Screen

Evacuation of the Chamber is via Gate Valve Manifold which allows for full segregation of the Chamber, evacuation by mean of turbo molecular pump backed by a dry scroll pump, and separate maintenance of deep vacuum by an Ion Pump, required of specific vibration sensitive experiments and processes. The Manifold enables the operator to configure the pumping to the specific needs of the given experiment.

: Front View—Open

: Gate Valve Manifold

Gas Mass Flow Controllers

« An array of Gas Mass Flow Controllers, a plenum manifold and a combination of UHV right angle valves enable the operator to combine up to six different source gases in a custom mixture and administer these gases in a range of process pressure regimes.

Performance Specifications

All performance specifications stated, including but not limited to, pump-down rates and vacuum levels make the following assumptions:

The Vacuum Chamber is empty.
The Vacuum Chamber and other system components are clean and dry.
The System is being operated at Sea Level
The ambient temperature is 18°C +/- 2°C
All system components, including those not supplied by Abbess, are appropriate for the system and are functioning properly.
The specifications are not impacted by the properties of your product.

If you require performance specifications for conditions other than those listed above, it is vital that you make this known to Abbess Instruments in writing. Generally Abbess Instruments recommends choosing chamber and pumping system qualities capable of achieving a theoretical vacuum at least an order of magnitude better than the desired operational vacuum.

It is to be noted that a specification described as '10-5 Torr' is a range, and means the clean, empty, dry chamber system is capable of reaching some undetermined value between 1.0x10-5 and 9.9x10-5 Torr: The (clean, empty, dry) chamber is deemed compliant whether its As-Built base vacuum is 1.0x10-5 Torr or 9.9x10-5 Torr. It does not mean that the chamber is guaranteed to reach every level within that range.