Our purge gas kit allow you to have control over which gases are in your system, and therefore which gases are being exposed to internal components, sensors, or other equipment. This also helps to prevent unwanted reactions from taking place, which can greatly increase the service life of your components. Utilization of the gas purge kit can also be used to vent your chamber back to atmospheric pressures should you not want to contaminate your AUT with room air.


  • Metering valve
  • Special Pressure Regulator Manifold
  • Source pressure gauge
  • Compound controlled gas gauge
  • Pressure relief valve

Requires – QF25 Chamber Port Valve and mating flange (ordered separately)

Automated UHV/HV Purge Kit

  • For automated tempered venting to dry inert gas purge of UHV/HV systems.
  • Recommended for use in chamber pre-conditioning and contamination control procedures.
  • Metering is manually set/adjusted to prevent side-effects of too rapid a vent.
  • NOTE: Ideally, UHV/HV systems should be always be vented to dry inert gas purge even during power failure.
    • CF or QF flanges
    • High Vacuum Solenoid valve, metering valve, flow regulator, and pressure relief
    • Sequence and Timer control integrated into VCC (ordered separately)


If cost is of concern ask about our purge gas kit without a VAT valve to reduce the cost. To get an accurate quote for the system you need fill out our RFQ or call today!