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Control Type
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| VACUUM LEVEL | Manual | Automated |
| LV | Manual LV Vent to Gas Purge Kit | Automated LV Vent to Gas Purge |
| UHV/HV | Manual UHV/HV Vent to Gas Purge Kit | Automated UHV/HV Vent to Gas Purge Kit |
Manual Purge Gas Port
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Manual LV Vent to Gas Purge Kit
For manual tempered venting to gas purge of LV systems.
- Ball valve, metering valve, flow regulator, and pressure relief valve
- Metering is manually set/adjusted
Automated LV Vent to Gas Purge Kit
For automated tempered venting to gas purge of LV systems.
- Solenoid valve, metering valve, flow regulator, and pressure relief valve
- Sequence and Timer control integrated into VCC (ordered separately)
- Metering is manually set/adjusted
Manual UHV/HV Vent to Gas Purge Kit
- For manual tempered venting to dry inert gas purge of UHV/HV systems.
- Recommended for use in chamber pre-conditioning and contamination control procedures.
- Recommended for use during power failure of automated UHV/HV system: Ideally, UHV/HV systems should be always be vented to dry inert gas purge even during power failure.
- Metering is manually set/adjusted to prevent side-effects of too rapid a vent.
- CF or QF flanges
- High Vacuum valve, metering valve, flow regulator, and pressure relief
Automated UHV/HV Vent to Gas Purge Kit
- For automated tempered venting to dry inert gas purge of UHV/HV systems.
- Recommended for use in chamber pre-conditioning and contamination control procedures.
- Metering is manually set/adjusted to prevent side-effects of too rapid a vent.
- NOTE: Ideally, UHV/HV systems should be always be vented to dry inert gas purge even during power failure. See our UHV/HV manual purge kit option for manual venting during a power failure.
- CF or QF flanges
- High Vacuum Solenoid valve, metering valve, flow regulator, and pressure relief
- Sequence and Timer control integrated into VCC (ordered separately)
