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Purge Kit Selection
Control Type
VACUUM LEVEL Manual Automated
LV Manual LV Vent to Gas Purge Kit Automated LV Vent to Gas Purge
UHV/HV Manual UHV/HV Vent to Gas Purge Kit Automated UHV/HV Vent to Gas Purge Kit
Manual Purge Gas Port

Manual Purge Gas Port

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Manual LV Vent to Gas Purge Kit

For manual tempered venting to gas purge of LV systems.

  • Ball valve, metering valve, flow regulator, and pressure relief valve
  • Metering is manually set/adjusted

Automated LV Vent to Gas Purge Kit

For automated tempered venting to gas purge of LV systems.

  • Solenoid valve, metering valve, flow regulator, and pressure relief valve
  • Sequence and Timer control integrated into VCC (ordered separately)
  • Metering is manually set/adjusted

Manual UHV/HV Vent to Gas Purge Kit

  • For manual tempered venting to dry inert gas purge of UHV/HV systems.
  • Recommended for use in chamber pre-conditioning and contamination control procedures.
  • Recommended for use during power failure of automated UHV/HV system: Ideally, UHV/HV systems should be always be vented to dry inert gas purge even during power failure.
  • Metering is manually set/adjusted to prevent side-effects of too rapid a vent.
  • CF or QF flanges
  • High Vacuum valve, metering valve, flow regulator, and pressure relief

Automated UHV/HV Vent to Gas Purge Kit

  • For automated tempered venting to dry inert gas purge of UHV/HV systems.
  • Recommended for use in chamber pre-conditioning and contamination control procedures.
  • Metering is manually set/adjusted to prevent side-effects of too rapid a vent.
  • NOTE: Ideally, UHV/HV systems should be always be vented to dry inert gas purge even during power failure. See our UHV/HV manual purge kit option for manual venting during a power failure.
    • CF or QF flanges
    • High Vacuum Solenoid valve, metering valve, flow regulator, and pressure relief
    • Sequence and Timer control integrated into VCC (ordered separately)

Automated UHV/HV Vent to Gas Purge Kit: