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Abbess Vacuum Pump Selection Page
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This is a page to help you select a pump for degas and vacuum work.
Need to learn the Basics? Click here
A complete system should include :
- A Vacuum Chamber, available at Abbess Vacuum Products page.
- Vacuum pump (with the features required for your use)
- Vacuum grade Hose,
- Filters or Traps, (to protect the pump and your product)
- Valves for vacuum control and breaking,
- Vacuum Gauges.
Other chambers and components are available at
Abbess Vacuum Products page.
We will be happy to intergrate the complete vacuum system for you.
These high quality vacuum pumps and accessories allow us to offer you a complete vacuum systems.
If you do not find the pump or component you need, please use the Alcatel site above to select and collect the vacuum components that you need with your chamber.
If you do not find the pump or component you need, please use the Pfeiffer site above to select and collect the vacuum components that you need with your chamber.
If you do not find the pump or component you need in the charts below, have any questions, need pricing, or custom configurations,
Please Call
Phone: (508) 881-8811, FAX: (508) 881-4884
US Toll Free: (800) 958-8886
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Abbess Vacuum Pump Selection -Low Cost
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Low Cost - VACUUM PUMPS
for various vacuum applications see manual PDF
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| Model Number |
LAV 3 |
LAV 10 |
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Free Air Displacement
CFM (L/min) @ 60 Hz |
3 (85) |
10 (285) |
| Max. Vacuum,"Hg (mTorr) |
29.92 (25) |
29.92 (25) |
| Tubing Needed, I.D. in. |
3/8" |
1/2" |
| Exhaust, Thread Type |
1/2" NPT |
1/2" NPT |
| Weight, lbs (kg) |
35 |
38 |
Pump Price US$
Wired for 115V, 60Hz, 1 PH |
$585 |
$895 |
Pump Price US$
Wired for 220V, 50Hz, 1 PH |
$597 |
$915 |
| Vacuum Grade Hose |
3/8"x6ft $45 |
1/2"x6ft $55 |
| Inlet filter 10uMcron |
$45 (FLTP-38F) |
$45 (FLTP-38F) |
| Exhaust filter |
$98 (EF-FG5-050) |
$98 (EF-FG5-050) |
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Abbess Vacuum Pump Selection - Oil Rotary Vane Pumps
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Alcatel - Oil - Rotary Vane pumps
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| Alcatel Rotary Vane Pumps |
2005SD |
2010SD
=TO WELCH 1402 |
2015SD |
2021SD |
2033SD |
| Free Air Displacement |
| CFM (m3/hr) @ 60 Hz |
3.8(5.4) |
6.8(9.7) |
10.6 (14.6) |
14.6 (20.7) |
23.3 (30) |
| Ultimate total pressure (*) closed gas ballast in mbar |
2.10E-03 |
2.10E-03 |
2.10E-03 |
2.10E-03 |
3.10E-03 |
| Inlet Flange |
DN25 |
DN25 |
DN25 |
DN25 |
DN40 |
| Exhaust Flange |
DN25 |
DN25 |
DN25 |
DN25 |
DN40 |
| Weight kg (lbs) |
25 (55) |
26 (57.2) |
27 (59.4) |
28 (61.6) |
61 (134) |
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Universal single-phase motor with power range of: 90V to 254V, 50/60Hz
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| OME Mist Filter |
$190.00 |
$190.00 |
$190.00 |
$190.00 |
$567.00 |
| Price US$ |
$2080 |
$2340 |
$2760 |
$3310 |
$5370 |
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WELCH - DuoSeal VACUUM PUMPS
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Bypass feature produces higher vacuum at lower RPM. Carries off the last portion of gas and confines excess oil and volatiles to the exhaust side of each stage, leaving less contamination on the other side. Low speed operation reduces the rate of friction and wear on parts so pumps require less maintenance. Gas ballast valves for condensation prevention and removal of contaminates. Large oil capacity absorbs greater amounts of contamination. Single-stage pump 1399B-01 is recommended for continuous duty. All are mounted on a rugged steel frame and include V-belts, pulleys, belt guard, oil supply and instructions. Wired for 115V/230V, 60 Hz, Single Phase. Cord with North American plug and in-line switch provided with motors of 1 H.P. and below. Motors over 1 H.P. require conduit wiring.
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| Catalog Number |
1400B-01 |
1402B-01
-in stock now |
1376B-01
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1397B-01 |
1374B-01
-in stock now |
| Free Air Displacement |
| CFM (L/min) @ 60 Hz |
0.9 (25) |
5.6 (160) |
10.6 (300) |
17.7 (500) |
23 (650) |
| Max. Vacuum, Torr |
1x10-4 |
1x10-4 |
1x10-4 |
1x10-4 |
1x10-4 |
| Pumping time charts |
 pump chart |
pump chart |
pump chart |
pump chart |
pump chart |
| Tubing Needed, I.D. in. |
1/2" |
3/4" |
3/4" |
1-1/2" |
1-1/2" |
| Intake, Nipple Thread |
3/4-20 |
1-20 |
1-20 |
1.75-20 |
1.75-20 |
| Exhaust, Thread Type |
3/4-20 |
1-20 |
1-20 |
1.75-20 |
1.75-20 |
| Pump dims in. (cm) |
17.8 x 9 x 12.6
(45.2 x 22.9 x 32) |
19.3 x 14.1 x 15.4
(49 x 35.3 x 39.1) |
20 x 14.1 x 15.4
(51 x 35.9 x 39) |
26 x 13.7 x 18.8
(66 x 34.8 x 47.6) |
27.8 x 16.2 x x20.9
(70.6 x 41.2 x 53) |
| Weight, lbs (kg) |
58(26) |
112(51) |
205(93) |
220 |
220(100) |
| Pump Price US$ |
$1870 |
$2825 |
$3825 |
$5025 |
$5955 |
| Manual |
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| Vacuum Grade Hose |
1/2"x6ft $45 |
3/4"x 6ft $125 |
3/4"x 6ft $125 |
1-1/2"x 6ft $285 |
1-1/2"x 6ft $285 |
| Inlet filter |
$145(CSL-843-050HC) |
$285(CSL-843-075HC) |
$285(CSL-843-075HC) |
$385(CSL-843-125HC) |
$385(CSL-843-125HC) |
| Exhaust filter |
$198(EF-FG3-077) |
$285(EF-FG10-103) |
$285(EF-FG10-103) |
$345(EF-FG10-177) |
$345(EF-FG10-177) |
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Chemstar™ vacuum Pumps
For Pumping Corrosive Gases
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Catalog Number
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1402N-90
CHEMSTAR W/EXPL MOTOR
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Free Air Displacement
CFM (L/min) @ 60 Hz |
5.6 (160) |
| Max. Vacuum, Torr |
1 x 10 -4 |
| Pumping time charts |
pump chart |
| Tubing Needed, I.D. in. |
3/4" |
| Pump motor |
Wired for 115V, 60Hz, 1 PH
with N. American 115V Plug |
| Pump dims |
19.3 x 14.1 x 15.4
(49 x 35.3 x 39.1) |
| Weight, lbs (kg) |
128(58) |
| Price US$ |
$3845 |
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| Vacuum Grade Hose |
(3/4"x 6ft) $125 |
Inlet filter
partical Trap |
$285(CSL-843-075HC) |
Inlet filter
Acid Neutralization Trap |
1420H-20
$425
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Exhaust
Hermetically Sealed Oil
Mist Eliminators |
1416D
$767
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Features
- High Contamination Tolerance -Large Oil Capacity Dilutes Contaminants
- Reduced Frictional Wear -Low (580) RPM for low wear and cool operation
- Nitrogen Purge -degas and cool oil
- Accessories for Corrosion Protection
- Vital parts Corrosion Resistant
- PTFE coated oil case
- Fluoroelastomer gaskets and seals
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- HCl, O3, H2SO4
- HBr, HOAC, SOx
- Br2, F3CCO2H, H2S
- Cl2, CH2O, HNO3
- SF6, CF4 Fragments and other gases
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Abbess Vacuum Pump Selection - Dry Pumps
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WELCH - Dry pumps
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STANDARD LAB DUTY - OIL-FREE
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Non-Corrosive Duty
* Degassing
* Cell harvesting
* Centrifuge
* Filtration
* Aspiration
* Drying
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Welch Dry Pumps provide a steady vacuum, unaffected by opening another faucet (water aspirators) or stopcock (house vacuum). There is no contaminated waste water to contend with and no oil maintainence required. Pumps meet or exceed the performance of water aspirators and house vacuum. Applications include vacuum filtration, rotary evaporation, aspiration, degassing and desiccating.
STANDARD DUTY PUMPS, constructed of aluminum and powered by an economical WOB-L® piston with Teflon® seal, should only be used to draw air or water vapor. Supplied with vacuum/pressure regulators and guages, water trap and muffler.
Pricing is valid only for USA and Canada. All prices are in U.S. dollars.
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Catalog Number |
| Wired for 115V, 60Hz, 1 PH with N. American 115V Plug |
2511B-01
$295.00
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2522B-01
$510.00
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2534B-01
$595.00
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2546B-01
$650.00
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| Wired for 220V, 50 Hz, 1 PH with Cont. Euro. (Schuko) Plug |
2511C-02
$295.00
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2522C-02
$510.00
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2534C-02
$595.00
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| Welch Model |
2511 |
2522 |
2534 |
2546 |
| Free Air Displacement |
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| CFM (L/min) @ 60 Hz |
0.39(11) |
0.76(22) |
1.2(34) |
1.6(45) |
| CFM (L/min) @ 50 Hz |
0.55(9.2) |
1.1(18) |
1.0(28) |
2.3(38) |
| Max. Cont. Press. PSIG (Pascal) |
33(3.3x106) |
100(106) |
50(5 x 105) |
100(106) |
| Max. Vacuum, in. Hg (Torr) |
21.3(219) |
26(100) |
27.2(70) |
27.6(60) |
| Motor Horsepower |
1/30 |
1/8 |
1/7 |
1/4 |
| Tubing Needed, I.D. in. |
3/16 |
1/4 |
1/4 |
1/4 |
| Weight, lbs (kg) |
5 |
11.7(5.3) |
11.7(5.3) |
13.8(6.3) |
| Dimensions L x W x H in. |
7.6 x 4.5 x 7.5 |
8.1 x 8.8 x 10 |
8.1 x 8.8 x 10 |
8.1 x 8.8 x 10 |
| Ship Weight, lbs (kg) |
6(1) |
15(6.6) |
15(6.6) |
18.5(8.4) |
| Inlet filter 10uMcron |
$45 (FLTP-38F)
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High Throughput - Oil-Free
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Non-Corrosive Duty
* Degassing
* Cell harvesting
* Centrifuge
* Filtration
* Aspiration
* Drying
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Features
* Vacuum to 4 Torr (29.8, in. Hg)
* Four sizes: 60, 65, 100 L/min
* No water or oil
* Lightweight, compact and quiet
* Continuous oil-free Pumping
Powered By An Economical WOB-L Piston
Simplicity is the key to the economical aluminum design. As piston wobbles, air resistance on upward stroke expands Teflon seal on piston to increase its efficiency while compensating for the wobble action.
Pricing is valid only for USA and Canada. All prices are in U.S. dollars.Pricing is valid only for USA and Canada. All prices are in U.S. dollars.
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Catalog Number |
Wired for 115V,
60 Hz 1 PH with
N. American 115V Plug |
2562B-01
$995.00
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2567B-01
$975.00
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2581B-24
$1,895.00 |
Wired for 220V,
50 Hz, 1 PH with
Cont. Euro. (Schuko) Plug2 |
2562C-02
$995.00
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2567C-02
$992.00
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2581C-24
$1,895.00
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| Welch Model |
2565 |
2580 |
2585 |
| Free Air Displacement |
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| CFM (L/min) @ 60 Hz |
3.1(88) |
3.5(99) |
7.1(201) |
| m3/hr (L/min) @ 50 Hz |
4.4(73) |
4.9(83) |
10(168) |
| Max. Vacuum, in. Hg |
27.6 |
29.6 |
27.6 |
Ultimate Pressure,
Torr (mbar) |
60(80) |
9(12) |
60(80) |
| Stages |
1 |
2 |
1 |
Tubing Needed,
I.D., in.(mm) |
3/8(10) |
3/8(10) |
3/8(10) |
Weight,
lbs (kg) |
16.5(7.5) |
22.5(10.3) |
22.5(10.3) |
Dimensions
(LxWxH), in. |
11.1x9.2x11 |
11.1x6.5x9.1 |
11.1x9.2x11 |
Ship Weight,
lbs (kg) |
21.5(9.7) |
27.5(12.5) |
27.5(12.5) |
| Inlet filter 10uMcron |
$45 (FLTP-38F)
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- All pumps supplied with an exhaust muffler and an installed intake hose barb.
- 50Hz models provided with CE marking
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Dry pumps
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| Alcatel Dry Roughing Pumps |
ACP15 |
ACP28 |
ACP40 |
ACP-120 |
| Peak pumping speed CFM (m3/hr) @ 60 Hz |
8.2 (14) |
16 (27) |
22 (37) |
65.8 (112) |
| Ultimate total pressure w/o N2 purge in mbar (torr) |
5.10E-02
(3.75E-02)
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3.10E-02
(2.25E-02)
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3.10E-02
(2.25E-02)
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1.5E-02
(1.12E-02)
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| Pumping time charts |
pump chart |
pump chart |
pump chart |
pump chart |
| Inlet Flange |
DN25 |
DN25 |
DN40 |
DN50 |
| Exhaust Flange |
DN16 |
DN25 |
DN25 |
DN40 |
| Power Input |
90V to 254V, 50/60Hz,
600VA
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90V to 254V, 50/60Hz,
1200W
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90V to 254V, 50/60Hz,
1200W
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200/208/230 Vac,
1.3-1.5kW
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| Weight kg (lbs) |
23 (50.6) |
33.5 (73.7) |
38 (83.6) |
205 (451) |
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| Inlet Particle Filter |
#111649 price $436 |
#111649 price $436 |
#111647 price $497 |
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| Exhaust Silencer |
#109873 price $343 |
#109873 price $343 |
#109873 price $343 |
#109418 price $call |
| Price US$ |
$5,610 |
$8505 |
$10,195 |
$19,280 |
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Abbess Vacuum Pump Selection - High Vacuum Tubro
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High Vacuum Dry Turbo Systems
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| Dry Turbopacks |
ATP80 Turbo System
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ATP100 Turbopack
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ATP150 Turbopack
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ATP400 Turbo System
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ATP900 Turbo System
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| Turbomolecular, l/s(CFM) |
80 (169.6)
DN63 ISO-K Flange
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100 (212)
DN100 ISO-K Flange
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140 (296.8)
DN100 ISO-K Flange
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400 (848)
DN160 ISO-K Flange
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900 (1,908)
DN200 ISO-K Flange
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| Ultimate Pressure in mbar (torr) |
5.0E-9 (3.75E-9) |
5.0E-9 (3.75E-9) |
5.0E-10 (3.75E-10) |
8.0E-10 (6.0E-10) |
5.0E-10 (3.75E-10) |
| Pumping time charts |
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pump chart for a 24" cube |
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| Turbo Controller, |
ACT 200 T |
ACT 200 T |
ACT 600 TH |
ACT 600TH |
ACT 1000 T |
| Inlet Screen |
DN63 ISO-K, 2.5mm |
DN100 ISO-K, 2.5mm |
DN100 ISO-K, 2.5mm |
DN160 ISO-K, 2.5mm |
DN200 ISO-K, 2.5mm |
| Vent Valve |
QF25 |
QF25 |
QF25 |
QF40 |
QF40 |
| Power Input
50/60Hz single phase
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100-240 Vac, 100VA |
100-240 Vac, 100VA |
100-240 Vac, 300VA |
100-240 Vac, 300VA |
100-240 Vac, 800VA |
| Price -Turbo system US$ |
$6,795 |
$8,195 |
$10,595 |
$16,895 |
$23,000 |
| Dry Roughing Pump
CFM (m3/hr) @ 60 Hz
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ACP15
8.2 (14)
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ACP15
8.2 (14)
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ACP15
8.2 (14)
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ACP28
16 (27)
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ACP40 or ACP-120 |
| Power Input |
115/220 Vac |
115/220 Vac |
115/220 Vac |
115/220 Vac |
115/220 Vac |
| Price Roughing US$ |
$5,045 |
$5,045 |
$5,045 |
$7,995 |
$22,325 |
click on image for more information
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Alcatel - Oil - Rotary Vane pumps
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| Alcatel Rotary Vane Pumps |
2005SD |
2010SD
=TO WELCH 1402 |
2015SD |
2021SD |
2033SD |
| Free Air Displacement |
| CFM (m3/hr) @ 60 Hz |
3.8(5.4) |
6.8(9.7) |
10.6 (14.6) |
14.6 (20.7) |
23.3 (30) |
| Ultimate total pressure (*) closed gas ballast in mbar |
2.10E-03 |
2.10E-03 |
2.10E-03 |
2.10E-03 |
3.10E-03 |
| Inlet Flange |
DN25 |
DN25 |
DN25 |
DN25 |
DN40 |
| Exhaust Flange |
DN25 |
DN25 |
DN25 |
DN25 |
DN40 |
| Weight kg (lbs) |
25 (55) |
26 (57.2) |
27 (59.4) |
28 (61.6) |
61 (134) |
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Universal single-phase motor with power range of: 90V to 254V, 50/60Hz
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| OME Mist Filter |
$190.00 |
$190.00 |
$190.00 |
$190.00 |
$567.00 |
| Price US$ |
$2080 |
$2340 |
$2760 |
$3310 |
$5370 |
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High Vacuum Dry Turbo Systems
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HiPace 400
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| 71 (150) DN63 ISO-K Flange
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260(550) DN100 ISO-K Flange
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445(943) DN100 ISO-K Flange
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| 5.0E-9 (3.75E-9) |
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5.0E-9 (3.75E-9) |
5.0E-10 (3.75E-10) |
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pump chart for a 24" cube |
| TC110 |
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TC400 |
TC-400 |
| air |
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water |
water |
| PM 061 512-T |
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PM 061 352-T |
PM-061-352-T |
| PM 061 355-T |
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PM 061 355-T |
PM 061 355-T |
| DN63 ISO-K, 4mm |
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DN100 ISO-K, 4mm |
DN100 ISO-K, 4mm |
| DN16 ISO-K, |
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DN16 ISO-K, |
DN25 ISO-K, |
| PM Z01 290 |
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PM-Z01-291 |
PM-Z01-291 |
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| 115-230 Vac, 110VA |
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115-230 Vac, 250VA |
115-230 Vac, 250VA |
| $7,895 |
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$14,533 |
$21,404 |
| MVP 015 8.2 (1.1)
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XTRA 150-2
8.2 (7.5)
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XTRA 150-2
(7.5)
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| 115/230 Vac |
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115/230 Vac |
115/230 Vac |
| $1,242 |
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$5,221 |
$5,221 |
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click on image for more information
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Hena Pumps are a Good Choice for Vacuum Drying Water Based Products
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| PK D02 250 |
PK D02 300 |
PK D02 400 |
PK D02 450 |
Hena 40, Single-Stage Rotary Vane Pump
- Pumping speed of 48 m3/hr (28 cfm)
- Water vapor capacity of 1100 g/hr (0.31 gallon/hr)
- DN 40 ISO-KF connection
- integrated oil mist separator, oil return and safety valve
- Prepped for D1 oil
- 220-240 V, 3 phase, 60 Hz |
Hena 60, Single-Stage Rotary Vane Pump
- Pumping speed of 76 m3/hr (45 cfm),
- Water vapor capacity of 1800 g/hr (0.47 gallon/hr)
- Inlet connection: DN 40 ISO-KF connection
- Integrated oil mist separator, oil return and safety valve
- Prepped and filled with D1 oil
- 190-240/380-480 V, 3 phase, 60 Hz operation |
Hena 200, Single-Stage Rotary Vane Pump
-240 m3/hr (141 cfm),
- Water vapor capacity of 4600g/hr (1.2 gallon/hr)
- DN 100 ISO-K connection
- Integrated oil mist separator, oil return and safety valve
- Prepped for D1 oil
- 380-480/660-830 V, 3 phase, 60 Hz |
Hena 300, Single-Stage Rotary Vane Pump
360 m3/hr (212 cfm),
- Water vapor capacity of 5800 g/hr (1.53 gallon/hr)
- DN 100 ISO-K connection
- Integrated oil mist separator, oil return and safety valve
- Prepped for D1 oil
-380-480/660-830 V, 3 phase, 60 Hz |
| $3,108 |
$4,079 |
$7,170 |
$10,179 |
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From Abbess
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Abbess Vacuum Pump Selection - Gauges
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Alcatel - Vacuum Gauges
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| Alcatel Gauges |
AP 2004
Pirani Gauge
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ACC 2009
Cold Cathode / Pirani
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ACH 2010
Hot Cathode / Pirani Gauge
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| Inlet Flange |
DN16 |
DN25 |
DN25 |
| Measurement Range |
1000 mbar to 5.0E-4 mbar |
1000 mbar to 5.0E-9 mbar
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1000 mbar to 5.0E-10 mbar
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| Price US$, Gauge |
$290 |
$976 |
$1100 |
| Gauge Controller |
ACS 2000
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ACS 2000
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ACS 2000
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| Sensor Cable |
5M |
5M |
5M |
| Power Input Gauge
50/60Hz single phase
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100-240 Vac, 100VA |
100-240 Vac, 100VA |
100-240 Vac, 300VA |
| Price US$, 5m cable and controller |
$684 |
$684 |
$684 |
| Price US$, Complete Gauge |
$1049 |
$1714 |
$1834 |
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Alcatel - Vacuum Micro Flow Valves
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| Alcatel Valves |
305360
Micro Flow Valve
digital flow indicator, quick on off
|
786543
Leak Valve
micro adjustable
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| Flange |
DN 16 ISO-KF |
DN 16 ISO-KF |
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| Settable gas flow |
5.10-6 to 1000 mbar l/s |
10 to 1000 mbar l/s |
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| Max differential |
2.5 bar |
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| Tightness |
1.10-9 mbar l/s |
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| material |
stainless |
Brass body |
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| Price US$ |
1195 |
575 |
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Vacuum Equipment
Oil-sealed Rotary Pump -
Capacities are available from 1/2 to 1,000 cubic feet per minute, operating from atmospheric pressure down to as low as 2 x 10-2 torr for single-stage pumps and less than 5 x 10-3 torr for two-stage pumps. The pumps develop their full speed in the range from atmosphere to about one torr. The speed then decreases to zero at their ultimate pressures. Two of the most common designs are useful for pumping both liquids and gases. One is a two-bladed pump in which the rotor is eccentric to the stator, forming a crescent-shaped volume swept by the blades through the outlet valve. The second, a rotary piston pump, similar to a single blade, is part of the sleeve fitting around the rotor. The blade is hollow and acts as an inlet valve, closing off the pump from the system when the rotor is at top center.
Ultimate pressures attainable are limited by leakage between the high and low-pressure sides of the pump (due mainly to carry over of gases and vapors dissolved in the sealing oil that flash off when exposed to the low inlet pressure) and decomposition of the oil exposed to high temperature spots generated by friction.
Gas ballasting helps to prolong pump life because it removes the chief source of pump contamination, condensable vapors. The gas ballast is a vented exhaust that admits a small amount of air at atmospheric pressure to the compression side of the pump, thus permitting most condensable vapors to pass through the pump without condensing.
Typical applications of this pump are in food packaging, high-speed centrifuges, and ultraviolet spectrometers. It is also widely used as a forepump or a roughing pump, or both, for most of the other pumps described.
Mechanical Booster -
Capacities are available from 100 to 70,000 cubic feet per minute, operating usually in the pressure range from 10 to 10-3torr. The peak speed of the pump is developed in the pressure range from 1 to 10-2 torr. The speed at the lower end of the pressure range depends on the type of forepump used. A typical mechanical booster uses two figure-eight-shaped impellers, synchronized by external gears, rotating in opposite directions inside the stator. The gas is trapped from between the impellers and the stator wall and transferred from the high vacuum to the fore vacuum side of the pump. The gears are oil-lubricated but are external to the pump, so that the impellers run dry. Clearance between the impellers and the stator wall is generally about .002 to .010-inch. As a consequence, back leaking of gas occurs at a rate governed by the pressure difference between input and output and the type of gas being pumped. Under normal running conditions, a pressure difference of about ten to one is obtained. The mechanical booster must be backed by another pump in series when working in its normal pressure range. The most frequently used type of forepump is the oil-sealed rotary pump. Typically, the mechanical booster is employed for pumping vacuum-melting furnaces, in an impregnation plant for electrical equipment, and in low density wind tunnels.
Molecular Pump -
Capacities are available up to 20,000 cubic feet per minute, with an operating range of 10-1 to 10-10 torr, when backed by an oil-sealed rotary pump. The full speed of the pump is developed in the very wide pressure range from 10-2 to 10-9 torr. In the molecular pump, a high rotational speed rotor (up to 32,000 revolutions per minute) imparts momentum to the gas molecules, moving them along the small clearance between the rotor and stator. The molecular drag pump also employs this principle of operation. For ultimate base pressures it has been almost entirely displaced by the faster and simpler turbo molecular pump, in which radial slots in both rotor and stator fins actuate the pump. A number of compression stages are employed but because of its design, larger clearances can be tolerated between rotor and stator than were possible in the molecular drag pump. The molecular drag pump is sometimes built integral with a turbo molecular pump to allow the use of vert clean "dry" backing pumps. These hybrids are often used in semiconductor processing where oil vapor backstreaming would contaminate processes but high pumping speeds are needed.
Vapor Diffusion Pump -
This pump is mainly used on equipment for the study of clean surfaces and in radio frequency sputtering. Pumping speeds are available up to 190,000 cubic feet per minute with an operating pressure range of 10-2 to less than 10-9 torr when water-cooled baffles are used and less than 10-11 torr when refrigerated baffles are employed. The pumping speed for a vapor pump remains constant from about 10-3 torr to well below the ultimate pressure limitations of the pump fluid. The best fluids allow pressures of better than 10-9 torr. The diffusion pump is initially evacuated by an oil-sealed rotary pump to a pressure of about 0.1 torr or less. When the pump fluid in the boiler is heated, it generates a boiler pressure of a few torr within the jet assembly. High-velocity vapor streams emerge from the jet assembly, impinge and condense on the water or air-cooled pump walls, and return to the boiler. In normal operation part of any gas arriving at the inlet jet is entrained, compressed, and transferred to the next stage. This process is repeated until the gas is removed by the mechanical forepump.
The oil-vapor booster pump works on the same principles as the diffusion pump, but it employs a higher boiler pressure. Normal operating pressure range is 1 to 10-4 torr. When backed by an oil-sealed rotary pump, this pump is widely used for achieving high vacuum in thin-film evaporation units, accelerators, and in TV tube pumping.
Sputter Ion Pump -
Capacities are available up to 14,000 cubic feet per minute, with an operating pressure range of 10-11 torr. The full speed of the pump is developed in the pressure range from about 10-6 to 10-8 torr, although the characteristic at the lower pressure is dependent on the pump design. This pump uses a cathode material such as titanium vaporized or sputtered by bombardment with high velocity ions. The active gasses are pumped by chemical combination with the sputtered titanium, the inert gasses by ionization and burial in the cathode, and the light gasses by diffusion into the cathode.
A typical pump consists of two flat rectangular cathodes with a stainless steel anode between them made up of many open-ended boxes. This assembly, mounted inside a narrow box attached to the vacuum system, is surrounded by a permanent magnet. The anode is operated at a potential of about seven kilovolts (kV), whereas the cathodes are at ground potential.
The sputter ion pump has low speeds and sometimes instability when pumping inert gases. To improve its characteristics other types of sputter ion pumps have been developed: the slotted cathode, triode, differential, and magnetron pumps.
To start up a sputter ion pump it is necessary to reduce the pressure to at least 2 x 10-2 torr, and preferably much lower, by means of a roughing pump. Sputter ion pumps can operate in any position and do not need water or liquid nitrogen supplies. They have a long life and can provide very clean, ultrahigh vacuum, free of organic contamination and vibration. They are employed mainly for the clean-surface studies and in those applications where any organic contamination will give unsatisfactory results.
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